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24/1/2016CF4, Tetrafluoromethane, R-14 Specialty Gas. Carbon Tetrafluoromethane (CF4, R-14) is a low temperature refrigerant and is also used in a variety of wafer etch processes. Tetrafluoromethane is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride. It is relatively inert under normal conditions and is a oxygen displacer.Get price
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